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1 Ergebnisse
1
Single Femtosecond Laser Pulse Induced Amorphization, Re-Cr..:
, In:
2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)
,
Bonse, Jorn
;
Florian, Camilo
;
Fischer, Daniel
... - p. 1-1 , 2023
Link:
https://doi.org/10.1109/CLEO/Europe-EQEC57999.2023.102..
RT T1
2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)
: T1
Single Femtosecond Laser Pulse Induced Amorphization, Re-Crystallization and Native Oxide Removal at Silicon Wafer Surfaces
UL https://suche.suub.uni-bremen.de/peid=ieee-10232055&Exemplar=1&LAN=DE A1 Bonse, Jorn A1 Florian, Camilo A1 Fischer, Daniel A1 Freiberg, Katharina A1 Duwe, Matthias A1 Sahre, Mario A1 Schneider, Stefan A1 Hertwig, Andreas A1 Kruger, Jorg A1 Beck, Uwe A1 Undisz, Andreas YR 2023 SN 2833-1052 K1 Image resolution K1 Transmission electron microscopy K1 Surface emitting lasers K1 Laser modes K1 Silicon K1 Laser ablation K1 Ultrafast electronics SP 1 OP 1 LK http://dx.doi.org/https://doi.org/10.1109/CLEO/Europe-EQEC57999.2023.10232055 DO https://doi.org/10.1109/CLEO/Europe-EQEC57999.2023.10232055 SF ELIB - SuUB Bremen
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