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Uniform Serpentine Spring Design of THz MEMS Switch for a L..:

, In: 2023 IEEE 6th International Conference on Electronic Information and Communication Technology (ICEICT),
Feng, Hui ; Wang, Xiaona ; He, Zhanmei... - p. 363-368 , 2023
Link: https://doi.org/10.1109/ICEICT57916.2023.10244826