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1 Ergebnisse
1
Case Study of SIMS Analysis on Insulators:
, In:
2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Wang, Yun
;
Ong, Kian Kok
;
Teo, Han Wei
... - p. 1-4 , 2023
Link:
https://doi.org/10.1109/IPFA58228.2023.10249031
RT T1
2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
: T1
Case Study of SIMS Analysis on Insulators
UL https://suche.suub.uni-bremen.de/peid=ieee-10249031&Exemplar=1&LAN=DE A1 Wang, Yun A1 Ong, Kian Kok A1 Teo, Han Wei A1 Khoo, Ley Hong A1 Nistala, Ramesh Rao A1 Mo, Zhi Qiang A1 Neo, Soh Ping YR 2023 SN 1946-1550 K1 Grounding K1 Metals K1 Surface charging K1 Ions K1 Insulators K1 Mass spectroscopy K1 Floods K1 Secondary Ion Mass Spectrometry (SIMS) K1 insulator K1 charge compensation K1 laser punch though K1 electrical grounding SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IPFA58228.2023.10249031 DO https://doi.org/10.1109/IPFA58228.2023.10249031 SF ELIB - SuUB Bremen
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