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1 Ergebnisse
1
New Spectrum Imaging Method for Solid Surfaces with Seconda..:
, In:
2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Uchida, Tatsuya
;
Ikita, Konomi
;
Tanaka, Akihiro
... - p. 1-4 , 2023
Link:
https://doi.org/10.1109/IPFA58228.2023.10249080
RT T1 <cTitle>2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)</cTitle>: T1 <Title>New Spectrum Imaging Method for Solid Surfaces with Secondary Electrons acquired over Wide Energy Range (>1000 eV)</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10249080&Exemplar=1&LAN=DE A1 Uchida, Tatsuya A1 Ikita, Konomi A1 Tanaka, Akihiro A1 Tsutsumi, Kenichi A1 Ikeo, Nobuyuki A1 Yokouchi, Kazushiro A1 Taguchi, Noboru A1 Tanaka, Shingo YR 2023 SN 1946-1550 K1 Integrated circuits K1 Spectroscopy K1 Energy loss K1 Energy resolution K1 Imaging K1 Failure analysis K1 Detectors K1 electron spectroscopy K1 electron image K1 chemical state analysis K1 AES K1 REELS SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IPFA58228.2023.10249080 DO https://doi.org/10.1109/IPFA58228.2023.10249080 SF ELIB - SuUB Bremen
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