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1 Ergebnisse
1
Rapid and specific failure analysis by fluorescence-guided ..:
, In:
2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Lo, Michael K. F.
- p. 1-6 , 2023
Link:
https://doi.org/10.1109/IPFA58228.2023.10249128
RT T1
2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
: T1
Rapid and specific failure analysis by fluorescence-guided optical photothermal infrared spectroscopy (FL-OPTIR)
UL https://suche.suub.uni-bremen.de/peid=ieee-10249128&Exemplar=1&LAN=DE A1 Lo, Michael K. F. YR 2023 SN 1946-1550 K1 Integrated circuits K1 Spectroscopy K1 Optical microscopy K1 Microscopy K1 Failure analysis K1 Fluorescence K1 Optical imaging K1 infrared K1 sub-micron IR K1 fluorescence K1 emission K1 O-PTIR K1 Raman K1 photothermal K1 cross-section K1 failure K1 contamination K1 creep K1 chemistry K1 spectroscopy K1 imaging K1 pump-probe SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/IPFA58228.2023.10249128 DO https://doi.org/10.1109/IPFA58228.2023.10249128 SF ELIB - SuUB Bremen
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