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1 Ergebnisse
1
Evaluation on AutoTEM5 Software For Automated TEM Sample Pr..:
, In:
2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Tee, Irene
;
Zhu, Jie
- p. 1-4 , 2023
Link:
https://doi.org/10.1109/IPFA58228.2023.10249151
RT T1
2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
: T1
Evaluation on AutoTEM5 Software For Automated TEM Sample Preparation In Semiconductor Failure Analysis
UL https://suche.suub.uni-bremen.de/peid=ieee-10249151&Exemplar=1&LAN=DE A1 Tee, Irene A1 Zhu, Jie YR 2023 SN 1946-1550 K1 Semiconductor device measurement K1 Automation K1 Transmission electron microscopy K1 Failure analysis K1 Milling K1 Throughput K1 Software K1 FIB K1 TEM K1 TEM sample preparation SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IPFA58228.2023.10249151 DO https://doi.org/10.1109/IPFA58228.2023.10249151 SF ELIB - SuUB Bremen
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