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1 Ergebnisse
1
Simulation and Design of A Two-Axis Electrostatically Drive..:
, In:
2023 International Applied Computational Electromagnetics Society Symposium (ACES-China)
,
Zhou, Jie
;
Chen, Shitao
;
He, Kaixuan
... - p. 1-3 , 2023
Link:
https://doi.org/10.23919/ACES-China60289.2023.10249709
RT T1 <cTitle>2023 International Applied Computational Electromagnetics Society Symposium (ACES-China)</cTitle>: T1 <Title>Simulation and Design of A Two-Axis Electrostatically Driven MOEMS Micromirror Chip</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10249709&Exemplar=1&LAN=DE A1 Zhou, Jie A1 Chen, Shitao A1 He, Kaixuan A1 Su, Yu A1 Guo, Xiaohui A1 Wang, Lexin A1 Yan, Zihao A1 Zhang, Xinyi YR 2023 K1 Micromechanical devices K1 Three-dimensional displays K1 Laser radar K1 Simulation K1 Resonant frequency K1 Voltage K1 Mathematical models K1 MEMS K1 micromirror K1 two-axis electrostatic SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.23919/ACES-China60289.2023.10249709 DO https://doi.org/10.23919/ACES-China60289.2023.10249709 SF ELIB - SuUB Bremen
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