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1 Ergebnisse
1
Cycle Planning for Concurrent Processing in a Dual-Armed Cl..:
, In:
2023 IEEE 19th International Conference on Automation Science and Engineering (CASE)
,
Kim, Hong-Yeon
;
Lee, Jun-Ho
;
Kim, Hyun-Jung
- p. 1-6 , 2023
Link:
https://doi.org/10.1109/CASE56687.2023.10260449
RT T1 <cTitle>2023 IEEE 19th International Conference on Automation Science and Engineering (CASE)</cTitle>: T1 <Title>Cycle Planning for Concurrent Processing in a Dual-Armed Cluster Tool</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10260449&Exemplar=1&LAN=DE A1 Kim, Hong-Yeon A1 Lee, Jun-Ho A1 Kim, Hyun-Jung YR 2023 SN 2161-8089 K1 Sequential analysis K1 Schedules K1 Job shop scheduling K1 Computer aided software engineering K1 Clustering algorithms K1 Semiconductor device manufacture K1 Throughput SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/CASE56687.2023.10260449 DO https://doi.org/10.1109/CASE56687.2023.10260449 SF ELIB - SuUB Bremen
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