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Leakage Mechanism of Ferroelectric Al0.7Sc0.3N Ultra-thin F..:

, In: 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF),
Chen, Li ; Wang, Zichu ; Liu, Chen... - p. 1-3 , 2023
Link: https://doi.org/10.1109/ISAF53668.2023.10265450