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Structural Strain of Piezoelectric Films on MEMS Diaphragm ..:

, In: 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF),
Yamashita, Kaoru ; Yamamoto, Kentaro ; Endo, Ryoma. - p. 1-4 , 2023
Link: https://doi.org/10.1109/ISAF53668.2023.10265638