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Modelling and experimental verification of a 350µm diameter..:

, In: 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP),
Sammut, Stephen ; Gatt, Edward ; Borg, Ruben Paul - p. 1-3 , 2023
Link: https://doi.org/10.1109/DTIP58682.2023.10267927