I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Zr-V getter films for MEMS packaging:

, In: 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP),
Lemettre, Sylvain ; Bessouet, Clement ; Kutyla, Charlotte... - p. 1-4 , 2023
Link: https://doi.org/10.1109/DTIP58682.2023.10267930