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1 Ergebnisse
1
Optical and Environmental Characterization Bench for 2D Mic..:
, In:
2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)
,
Guerreiro, Sara
;
Bainschab, Markus
;
Piot, Adrien
... - p. 1-6 , 2023
Link:
https://doi.org/10.1109/DTIP58682.2023.10267932
RT T1 <cTitle>2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)</cTitle>: T1 <Title>Optical and Environmental Characterization Bench for 2D Micromirrors</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10267932&Exemplar=1&LAN=DE A1 Guerreiro, Sara A1 Bainschab, Markus A1 Piot, Adrien A1 Rocha, Rodrigo Tumolin A1 Toshiyoshi, Hiroshi A1 Bosseboeuf, Alain A1 Sasaki, Takashi A1 Lagosh, Anton A1 Moridi, Mohssen YR 2023 SN 2768-1874 K1 Micromechanical devices K1 Temperature sensors K1 Temperature measurement K1 Performance evaluation K1 Optical design K1 Optical variables measurement K1 Packaging K1 Optical characterization K1 Frequency response K1 MOEMS K1 Scanning micromirror K1 Semi-automated SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/DTIP58682.2023.10267932 DO https://doi.org/10.1109/DTIP58682.2023.10267932 SF ELIB - SuUB Bremen
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