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Implementation of an all-digital electrostatic micro-mirror..:

, In: 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP),
Portelli, Barnaby ; Grech, Ivan ; Micallef, Joseph... - p. 1-4 , 2023
Link: https://doi.org/10.1109/DTIP58682.2023.10267937