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Laser Structured Silicon Based Multi Fourier Horn Resonator:

, In: 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP),
Al-Mogahed, Wail ; Voigt, Sebastian ; Mehner, Philipp J.... - p. 1-5 , 2023
Link: https://doi.org/10.1109/DTIP58682.2023.10267949