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1 Ergebnisse
1
MEMS Array Tactile Sensors with a Self-Calibration Structur:
, In:
2023 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
,
Zhong, Yuxin
;
Hu, Mengyi
;
Xing, Yunhong
... - p. 1-5 , 2023
Link:
https://doi.org/10.1109/MARSS58567.2023.10294140
RT T1 <cTitle>2023 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)</cTitle>: T1 <Title>MEMS Array Tactile Sensors with a Self-Calibration Structure</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10294140&Exemplar=1&LAN=DE A1 Zhong, Yuxin A1 Hu, Mengyi A1 Xing, Yunhong A1 Zhao, Jiabo A1 You, Weilong A1 Wu, Guoqiang A1 Liu, Chaoran A1 Dong, Linxi YR 2023 K1 Micromechanical devices K1 Semiconductor device measurement K1 Sensitivity K1 Area measurement K1 Tactile sensors K1 Silicon K1 Finite element analysis K1 MEMS K1 piezoresistive K1 piezoelectric drive K1 self-calibration SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/MARSS58567.2023.10294140 DO https://doi.org/10.1109/MARSS58567.2023.10294140 SF ELIB - SuUB Bremen
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