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Development of resistors with TaxNy deposited by RF sputter..:

, In: 2023 37th Symposium on Microelectronics Technology and Devices (SBMicro),
Cesar, R. R. ; Mederos, M. ; Joanni, E.... - p. 1-4 , 2023
Link: https://doi.org/10.1109/SBMicro60499.2023.10302490