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Fabrication and characterization of polymer CMUTs:

, In: 2023 37th Symposium on Microelectronics Technology and Devices (SBMicro),
Alves, Gustavo Marcati A. ; Pai, Chi Nan ; Rehder, Gustavo P. - p. 1-4 , 2023
Link: https://doi.org/10.1109/SBMicro60499.2023.10302545