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Magnetic field effect on the sheath in plasma immersion ion..:
, In:
IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340)
,
Keidar, M.
;
Monteiro, O.R.
;
Anders, A.
. - p. 258 , 2002
Link:
https://doi.org/10.1109/PLASMA.2002.1030536
RT T1
IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340)
: T1
Magnetic field effect on the sheath in plasma immersion ion implantation
UL https://suche.suub.uni-bremen.de/peid=ieee-1030536&Exemplar=1&LAN=DE A1 Keidar, M. A1 Monteiro, O.R. A1 Anders, A. A1 Boyd, I.D. YR 2002 K1 Plasma immersion ion implantation K1 Probes K1 Magnetic field measurement K1 Plasma measurements K1 Electrons K1 Magnetic materials K1 Plasma properties K1 Plasma sheaths K1 Acceleration K1 Plasma sources SP 258 LK http://dx.doi.org/https://doi.org/10.1109/PLASMA.2002.1030536 DO https://doi.org/10.1109/PLASMA.2002.1030536 SF ELIB - SuUB Bremen
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