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Ablation plasma ion implantation (APII) for deposition of m..:

, In: IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340),
Gilgenbach, R.M. ; Qi, B. ; Lau, Y.Y.... - p. 260 , 2002
Link: https://doi.org/10.1109/PLASMA.2002.1030540