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Technology for Obtaining Membranes Based on Porous Silicon:

, In: 2023 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO),
Alexandrov, N.V. ; Starkov, V.V. ; Gosteva, E.A. - p. 76-79 , 2023
Link: https://doi.org/10.1109/3M-NANO58613.2023.10305406