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In-situ measurements of etch rates in an electron-beam prod..:

, In: IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340),
Balkey, M.M. ; Leonhardt, D. ; Walton, S.G.... - p. 265 , 2002
Link: https://doi.org/10.1109/PLASMA.2002.1030550