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Multilayer TiCN deposition using a magnetized sheet plasma ..:

, In: IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340),
Ramos, H.J. ; Arciaga, M.E. - p. 265 , 2002
Link: https://doi.org/10.1109/PLASMA.2002.1030551