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1 Ergebnisse
1
A Thin Film Multi-Layered SAW Resonator on Sapphire Substra..:
, In:
2023 IEEE International Ultrasonics Symposium (IUS)
,
Komiyama, Ryohei
;
Gonoi, Takashi
;
Nishizawa, Toshio
- p. 1-4 , 2023
Link:
https://doi.org/10.1109/IUS51837.2023.10306382
RT T1
2023 IEEE International Ultrasonics Symposium (IUS)
: T1
A Thin Film Multi-Layered SAW Resonator on Sapphire Substrate with High Acoustic Velocity Stability for Film Thickness Variations
UL https://suche.suub.uni-bremen.de/peid=ieee-10306382&Exemplar=1&LAN=DE A1 Komiyama, Ryohei A1 Gonoi, Takashi A1 Nishizawa, Toshio YR 2023 SN 1948-5727 K1 Silicon compounds K1 Sensitivity K1 Surface acoustic waves K1 Resonant frequency K1 Surface acoustic wave devices K1 Trademarks K1 Acoustics K1 surface acoustic wave (SAW) K1 multi-layered SAW K1 frequency variation SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IUS51837.2023.10306382 DO https://doi.org/10.1109/IUS51837.2023.10306382 SF ELIB - SuUB Bremen
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