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1 Ergebnisse
1
Impact of Transducer Aspect Ratio on the performance of AlN..:
, In:
2023 IEEE International Ultrasonics Symposium (IUS)
,
Barsoum, S.
;
Schembri, A.
;
Bernard, M.
... - p. 1-4 , 2023
Link:
https://doi.org/10.1109/IUS51837.2023.10307380
RT T1
2023 IEEE International Ultrasonics Symposium (IUS)
: T1
Impact of Transducer Aspect Ratio on the performance of AlN Hybrid SAW/BAW Resonators
UL https://suche.suub.uni-bremen.de/peid=ieee-10307380&Exemplar=1&LAN=DE A1 Barsoum, S. A1 Schembri, A. A1 Bernard, M. A1 Lefevre, A. A1 Bousquet, M. A1 Reinhardt, A. A1 Laroche, T. A1 Ballandras, S. A1 Dubus, B. YR 2023 SN 1948-5727 K1 Couplings K1 Transducers K1 Resonant frequency K1 Market research K1 Harmonic analysis K1 Etching K1 Distance measurement K1 Hybrid SAW/BAW resonators K1 AlN K1 high quality factor K1 piezoelectric K1 resonator K1 SAW K1 BAW K1 dry etching K1 MEMS SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IUS51837.2023.10307380 DO https://doi.org/10.1109/IUS51837.2023.10307380 SF ELIB - SuUB Bremen
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