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1 Ergebnisse
1
High Overtone Mode Solid Mounted Resonators with Polarity I..:
, In:
2023 IEEE International Ultrasonics Symposium (IUS)
,
Suzuki, Masashi
;
Sekimoto, Jun
;
Kakio, Shoji
- p. 1-3 , 2023
Link:
https://doi.org/10.1109/IUS51837.2023.10307464
RT T1
2023 IEEE International Ultrasonics Symposium (IUS)
: T1
High Overtone Mode Solid Mounted Resonators with Polarity Inverted Multilayered SiAlN/AlN Films
UL https://suche.suub.uni-bremen.de/peid=ieee-10307464&Exemplar=1&LAN=DE A1 Suzuki, Masashi A1 Sekimoto, Jun A1 Kakio, Shoji YR 2023 SN 1948-5727 K1 X-ray scattering K1 Stacking K1 Solids K1 Mirrors K1 Resonators K1 III-V semiconductor materials K1 Substrates K1 bulk acoustic wave resonators K1 AlN films K1 polarity inverted films K1 high-overtone mode resonances SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/IUS51837.2023.10307464 DO https://doi.org/10.1109/IUS51837.2023.10307464 SF ELIB - SuUB Bremen
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