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1 Ergebnisse
1
A Novel SAW Resonator with Anti-Groove Structure Based on H..:
, In:
2023 IEEE International Ultrasonics Symposium (IUS)
,
Lin, Binghui
;
Liu, Yan
;
Luo, Tiancheng
... - p. 1-3 , 2023
Link:
https://doi.org/10.1109/IUS51837.2023.10308010
RT T1
2023 IEEE International Ultrasonics Symposium (IUS)
: T1
A Novel SAW Resonator with Anti-Groove Structure Based on Heterogeneous Substrate
UL https://suche.suub.uni-bremen.de/peid=ieee-10308010&Exemplar=1&LAN=DE A1 Lin, Binghui A1 Liu, Yan A1 Luo, Tiancheng A1 Wang, Yaxin A1 Gao, Chao A1 Zou, Yang A1 Liu, Wenjuan A1 Cai, Yao A1 Sun, Chengliang YR 2023 SN 1948-5727 K1 Ion implantation K1 Lithium niobate K1 Resonant frequency K1 Software K1 Acoustics K1 Bonding K1 Substrates K1 SAW K1 Anti-groove K1 Heterogeneous substrate SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/IUS51837.2023.10308010 DO https://doi.org/10.1109/IUS51837.2023.10308010 SF ELIB - SuUB Bremen
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