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Influence of Surface Halogenation on Silane Adsorption onto..:
, In:
2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
,
Jeong, Hyunhak
;
Kim, Byungjo
;
Yoo, Suyoung
. - p. 81-84 , 2023
Link:
https://doi.org/10.23919/SISPAD57422.2023.10319640
RT T1 <cTitle>2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)</cTitle>: T1 <Title>Influence of Surface Halogenation on Silane Adsorption onto Si(001) Surface for Poly-Si Epitaxy: A Density Functional Theory Study with Neural Network Potential</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10319640&Exemplar=1&LAN=DE A1 Jeong, Hyunhak A1 Kim, Byungjo A1 Yoo, Suyoung A1 Nam, Sang Ki YR 2023 K1 Potential energy K1 Adsorption K1 Hydrogen K1 Discrete Fourier transforms K1 Density functional theory K1 Silicon K1 Epitaxial growth K1 Density Functional Theory K1 Si epitaxy K1 Surface halogenation K1 Molecular dynamics K1 Neural network potential SP 81 OP 84 LK http://dx.doi.org/https://doi.org/10.23919/SISPAD57422.2023.10319640 DO https://doi.org/10.23919/SISPAD57422.2023.10319640 SF ELIB - SuUB Bremen
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