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1 Ergebnisse
1
A 36% Scandium Aluminum Nitride pMUT - FBAR Dual Mode Press..:
, In:
2023 IEEE SENSORS
,
Gubinelli, Walter
;
Colombo, Luca
;
Soukup, Bernard Herrera
... - p. 01-04 , 2023
Link:
https://doi.org/10.1109/SENSORS56945.2023.10325115
RT T1
2023 IEEE SENSORS
: T1
A 36% Scandium Aluminum Nitride pMUT - FBAR Dual Mode Pressure Sensor for IoT Applications
UL https://suche.suub.uni-bremen.de/peid=ieee-10325115&Exemplar=1&LAN=DE A1 Gubinelli, Walter A1 Colombo, Luca A1 Soukup, Bernard Herrera A1 Simeoni, Pietro A1 Kopp, Blair A1 Corigliano, Alberto A1 Cassella, Cristian A1 Rinaldi, Matteo YR 2023 SN 2168-9229 K1 Temperature sensors K1 Pressure sensors K1 Performance evaluation K1 Temperature measurement K1 Temperature distribution K1 CMOS technology K1 Behavioral sciences K1 Internet of Things K1 IoT K1 pMUT K1 FBAR K1 pressure sensor K1 temperature sensor SP 01 OP 04 LK http://dx.doi.org/https://doi.org/10.1109/SENSORS56945.2023.10325115 DO https://doi.org/10.1109/SENSORS56945.2023.10325115 SF ELIB - SuUB Bremen
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