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1 Ergebnisse
1
Significance of the substrate temperature on the physical p..:
, In:
2023 20th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)
,
Vazquez-Barragan, N.E.
;
Santos-Cruz, J.
;
Perez-Garcia, C.E.
... - p. 1-5 , 2023
Link:
https://doi.org/10.1109/CCE60043.2023.10332912
RT T1
2023 20th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)
: T1
Significance of the substrate temperature on the physical properties of RF sputtered Sb2Te3 thin films
UL https://suche.suub.uni-bremen.de/peid=ieee-10332912&Exemplar=1&LAN=DE A1 Vazquez-Barragan, N.E. A1 Santos-Cruz, J. A1 Perez-Garcia, C.E. A1 Mayen-Hernandez, S. A. A1 Melendez-Lira, M. A1 de Moure-Flores, F. YR 2023 SN 2642-3766 K1 Radio frequency K1 Temperature measurement K1 Temperature K1 Optical diffraction K1 Diffraction K1 Optical device fabrication K1 Optical buffering K1 Sb2Te3 K1 thin films K1 RF sputtering K1 buffer layer SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/CCE60043.2023.10332912 DO https://doi.org/10.1109/CCE60043.2023.10332912 SF ELIB - SuUB Bremen
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