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Analysis of Circular Transfer Length Methods for the Optimi..:
, In:
2023 14th Spanish Conference on Electron Devices (CDE)
,
Cano, Aitana
;
Cifuentes, Luis
;
Rey-Stolle, Ignacio
. - p. 1-4 , 2023
Link:
https://doi.org/10.1109/CDE58627.2023.10339463
RT T1
2023 14th Spanish Conference on Electron Devices (CDE)
: T1
Analysis of Circular Transfer Length Methods for the Optimization of Metal Contacts on Wafers
UL https://suche.suub.uni-bremen.de/peid=ieee-10339463&Exemplar=1&LAN=DE A1 Cano, Aitana A1 Cifuentes, Luis A1 Rey-Stolle, Ignacio A1 Garcia, Ivan YR 2023 SN 2643-1300 K1 Resistance K1 Semiconductor device measurement K1 Uncertainty K1 Sensitivity K1 Germanium K1 Contact resistance K1 Nonhomogeneous media K1 TLM K1 CTLM K1 contact resistance K1 sheet resistance K1 contacts optimization SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/CDE58627.2023.10339463 DO https://doi.org/10.1109/CDE58627.2023.10339463 SF ELIB - SuUB Bremen
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