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Ultra-precision cutting technology to fabricate the micro h..:

, In: 2023 IEEE Nanotechnology Materials and Devices Conference (NMDC),
Choi, Doo-Sun ; Gwak, Eun-Ji ; Han, Jun Sae... - p. 318-320 , 2023
Link: https://doi.org/10.1109/NMDC57951.2023.10344023