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Self-Aligned Formation and Positioning of Nanogap Templates:

, In: 2023 IEEE Nanotechnology Materials and Devices Conference (NMDC),
Boer, Dean de ; Berenschot, Erwin ; Pordeli, Yasser. - p. 284-289 , 2023
Link: https://doi.org/10.1109/NMDC57951.2023.10344109