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Chemistry for the Focused Electron and Ion Beam-Induced Dep..:

, In: 2023 IEEE Nanotechnology Materials and Devices Conference (NMDC),
Chaudhary, Atul ; Eckhert, Patrick ; Fairbrother, D. Howard. - p. 501-504 , 2023
Link: https://doi.org/10.1109/NMDC57951.2023.10344187