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Boron Ion Implantation-Induced Embedded Layers for Ultra-Th..:

, In: 2023 IEEE Nanotechnology Materials and Devices Conference (NMDC),
Chen, Yen Shuo ; Chiu, Tzu Wei ; Ko, Yu Chien... - p. 717-720 , 2023
Link: https://doi.org/10.1109/NMDC57951.2023.10344222