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A Mini Review on MEMS Switches: Design, Fabrication, and Ap..:

, In: 2023 3rd International Conference on Energy, Power and Electrical Engineering (EPEE),
Patel, Pramod Kumar ; Gurmaita, P.K. ; Gurmaita, S.K.... - p. 96-103 , 2023
Link: https://doi.org/10.1109/EPEE59859.2023.10351866