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Modeling and Simulation Method for a Belt-Driven SiliconWaf..:
, In:
2023 62nd Annual Conference of the Society of Instrument and Control Engineers (SICE)
,
Fukui, Yoshiro
;
Murayama, Yusuke
- p. 730-735 , 2023
Link:
https://doi.org/10.23919/SICE59929.2023.10354144
RT T1 <cTitle>2023 62nd Annual Conference of the Society of Instrument and Control Engineers (SICE)</cTitle>: T1 <Title>Modeling and Simulation Method for a Belt-Driven SiliconWafer Transfer Robot Considering Static Friction</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10354144&Exemplar=1&LAN=DE A1 Fukui, Yoshiro A1 Murayama, Yusuke YR 2023 K1 Semiconductor device modeling K1 Friction K1 Force K1 Dynamics K1 Semiconductor device manufacture K1 Belts K1 Silicon K1 Mechanical system modeling K1 Belt-driven robot K1 Static friction K1 n-link robot arm K1 Euler-Lagrange system SP 730 OP 735 LK http://dx.doi.org/https://doi.org/10.23919/SICE59929.2023.10354144 DO https://doi.org/10.23919/SICE59929.2023.10354144 SF ELIB - SuUB Bremen
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