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1
A Study of POCl3 Deposition Reaction Rate with Residual Gas..:
, In:
2023 IEEE 50th Photovoltaic Specialists Conference (PVSC)
,
Kang, Min Gu
;
Lee, Sang Hee
;
Jung, Kyung Taek
... - p. 1-1 , 2023
Link:
https://doi.org/10.1109/PVSC48320.2023.10359842
RT T1 <cTitle>2023 IEEE 50th Photovoltaic Specialists Conference (PVSC)</cTitle>: T1 <Title>A Study of POCl3 Deposition Reaction Rate with Residual Gas Analysis Method</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10359842&Exemplar=1&LAN=DE A1 Kang, Min Gu A1 Lee, Sang Hee A1 Jung, Kyung Taek A1 Cho, Yunae A1 Kim, Dohyung A1 Park, Sungeun A1 Kim, Munse A1 Song, Hee-Eun YR 2023 K1 Process monitoring K1 Photovoltaic systems K1 Manufacturing processes K1 Real-time systems K1 Chemical vapor deposition K1 Sputtering SP 1 OP 1 LK http://dx.doi.org/https://doi.org/10.1109/PVSC48320.2023.10359842 DO https://doi.org/10.1109/PVSC48320.2023.10359842 SF ELIB - SuUB Bremen
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