I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Metrology Challenge for Monitoring Post CMP Pattern Through..:
, In:
2023 International Workshop on Advanced Patterning Solutions (IWAPS)
,
Wang, Gang
;
Bian, Yuyang
;
Liu, Biqiu
.. - p. 1-4 , 2023
Link:
https://doi.org/10.1109/IWAPS60466.2023.10366072
RT T1 <cTitle>2023 International Workshop on Advanced Patterning Solutions (IWAPS)</cTitle>: T1 <Title>Metrology Challenge for Monitoring Post CMP Pattern Through CD SEM</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10366072&Exemplar=1&LAN=DE A1 Wang, Gang A1 Bian, Yuyang A1 Liu, Biqiu A1 Zhang, Cong A1 Zhou, Wenzhan YR 2023 K1 Scanning electron microscopy K1 Semiconductor device measurement K1 Spectroscopy K1 Electron beams K1 Optical variables measurement K1 Metrology K1 Semiconductor device manufacture K1 CD-SEM K1 post-CMP K1 algorithm K1 correlation SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IWAPS60466.2023.10366072 DO https://doi.org/10.1109/IWAPS60466.2023.10366072 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
