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1 Ergebnisse
1
Improve photomask writing error using Registration Correcti..:
, In:
2023 International Workshop on Advanced Patterning Solutions (IWAPS)
,
Zeng, Yilei
;
Tang, Levi
;
Wang, Yingjie
... - p. 1-4 , 2023
Link:
https://doi.org/10.1109/IWAPS60466.2023.10366127
RT T1
2023 International Workshop on Advanced Patterning Solutions (IWAPS)
: T1
Improve photomask writing error using Registration Correction (RegC) technology
UL https://suche.suub.uni-bremen.de/peid=ieee-10366127&Exemplar=1&LAN=DE A1 Zeng, Yilei A1 Tang, Levi A1 Wang, Yingjie A1 Chen, Kun A1 Liu, Adam A1 Zhang, Claire YR 2023 K1 Simulation K1 Conferences K1 Writing K1 Error correction K1 Indexes K1 Tuning K1 Optimization K1 Photomask K1 Writing error K1 Registration K1 RegC K1 Operation mode K1 Sampling scheme SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IWAPS60466.2023.10366127 DO https://doi.org/10.1109/IWAPS60466.2023.10366127 SF ELIB - SuUB Bremen
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