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1 Ergebnisse
1
Feature Point-Based Proximity Effect Correction of Patterns:
, In:
2023 International Workshop on Advanced Patterning Solutions (IWAPS)
,
Wang, Wenhao
;
Huang, Kangpeng
;
Zhang, Zhensheng
... - p. 1-4 , 2023
Link:
https://doi.org/10.1109/IWAPS60466.2023.10366159
RT T1 <cTitle>2023 International Workshop on Advanced Patterning Solutions (IWAPS)</cTitle>: T1 <Title>Feature Point-Based Proximity Effect Correction of Patterns</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10366159&Exemplar=1&LAN=DE A1 Wang, Wenhao A1 Huang, Kangpeng A1 Zhang, Zhensheng A1 Song, Xuefeng A1 Feng, Siyu A1 Yu, Dapeng YR 2023 K1 Shape K1 Electron beams K1 Conferences K1 Lithography K1 Proximity effects K1 Proximity Effect Correction K1 Electron Beam Lithography K1 Feature Points SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IWAPS60466.2023.10366159 DO https://doi.org/10.1109/IWAPS60466.2023.10366159 SF ELIB - SuUB Bremen
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