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Rigorous Simulation for Impact of Self-Aligned Multiple Pat..:

, In: 2023 International Workshop on Advanced Patterning Solutions (IWAPS),
Yao, Mingyi ; Qi, Yuejing ; Zhou, Guangying... - p. 1-3 , 2023
Link: https://doi.org/10.1109/IWAPS60466.2023.10366168