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1 Ergebnisse
1
Fast imaging model of periodic patterns in plasmonic lithog..:
, In:
2023 International Workshop on Advanced Patterning Solutions (IWAPS)
,
Ding, Huwen
;
Wei, Yayi
- p. 1-5 , 2023
Link:
https://doi.org/10.1109/IWAPS60466.2023.10366180
RT T1 <cTitle>2023 International Workshop on Advanced Patterning Solutions (IWAPS)</cTitle>: T1 <Title>Fast imaging model of periodic patterns in plasmonic lithography</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10366180&Exemplar=1&LAN=DE A1 Ding, Huwen A1 Wei, Yayi YR 2023 K1 Surface plasmon polaritons K1 Diffraction K1 Computational modeling K1 Lithography K1 Fitting K1 Imaging K1 Machine learning K1 plasmonic lithography K1 fast imaging model K1 periodic patterns K1 machine learning SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/IWAPS60466.2023.10366180 DO https://doi.org/10.1109/IWAPS60466.2023.10366180 SF ELIB - SuUB Bremen
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