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Heat Treatment Dependence and Electrical Characterization o..:

, In: 2023 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK),
Hirano, Yuusuke ; Ban, Takahiko ; Ichimiya, Masayoshi.. - p. 1-2 , 2023
Link: https://doi.org/10.1109/IMFEDK60983.2023.10366329