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Silicon Nitride High Confinement Thermally- and E/O Tuned P..:

, In: 2023 Asia Communications and Photonics Conference/2023 International Photonics and Optoelectronics Meetings (ACP/POEM),

Baburin, Aleksandr S. ; Avdeev, Sergey S. ; Belyaev, Arseniy V.... - p. 01-03 , 2023

Link: https://doi.org/10.1109/ACP/POEM59049.2023.10369153

RT 
T1 <cTitle>2023 Asia Communications and Photonics Conference/2023 International Photonics and Optoelectronics Meetings (ACP/POEM)</cTitle>: T1 <Title>Silicon Nitride High Confinement Thermally- and E/O Tuned Photonic Integrated Platfrom</Title>

UL https://suche.suub.uni-bremen.de/peid=ieee-10369153&Exemplar=1&LAN=DE
				
A1 Baburin, Aleksandr S.
A1 Avdeev, Sergey S.
A1 Belyaev, Arseniy V.
A1 Buzaverov, Kirill A.
A1 Lotkov, Evgeniy S.
A1 Sergeev, Evgeny V.
A1 Bukatin, Sergey V.
A1 Amiraslanov, Ali Sh.
A1 Ryzhikov, Ilya A.
A1 Rodionov, Ilya A.
YR 2023
K1 Optical losses
K1 Couplings
K1 Wavelength measurement
K1 Wires
K1 Silicon nitride
K1 Propagation losses
K1 Loss measurement
K1 photonic integrated circuit
K1 silicon nitride
K1 e-beam lithography
K1 reactive ion etching
K1 propagation losses
K1 transparent conductive oxide
K1 electro-optical modulation
SP 01
OP 03
LK http://dx.doi.org/https://doi.org/10.1109/ACP/POEM59049.2023.10369153
DO https://doi.org/10.1109/ACP/POEM59049.2023.10369153
SF ELIB - SuUB Bremen

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