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1 Ergebnisse
1
Wafer Map Defect Recognition and Accurate Localization Base..:
, In:
2023 IEEE International Conference on Cybernetics and Intelligent Systems (CIS) and IEEE Conference on Robotics, Automation and Mechatronics (RAM)
,
Sang, Tong
;
Sun, Dai
;
Zhao, Wei
.. - p. 186-191 , 2023
Link:
https://doi.org/10.1109/CIS-RAM55796.2023.10370761
RT T1 <cTitle>2023 IEEE International Conference on Cybernetics and Intelligent Systems (CIS) and IEEE Conference on Robotics, Automation and Mechatronics (RAM)</cTitle>: T1 <Title>Wafer Map Defect Recognition and Accurate Localization Based on Defect Completion Algorithm</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10370761&Exemplar=1&LAN=DE A1 Sang, Tong A1 Sun, Dai A1 Zhao, Wei A1 Chen, Ruohui A1 Zeng, Zeng YR 2023 SN 2326-8239 K1 Semiconductor device modeling K1 Image segmentation K1 Mechatronics K1 Noise reduction K1 Random access memory K1 Production K1 Semiconductor device manufacture K1 defect pattern K1 regional completion K1 semiconductor manufacturing K1 wafer map K1 and image segmentation SP 186 OP 191 LK http://dx.doi.org/https://doi.org/10.1109/CIS-RAM55796.2023.10370761 DO https://doi.org/10.1109/CIS-RAM55796.2023.10370761 SF ELIB - SuUB Bremen
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