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1 Ergebnisse
1
Deep Learning for Automatic Wafer Monitoring System:
, In:
2023 Smart Systems Integration Conference and Exhibition (SSI)
,
Rundo, Francesco
;
Calabretta, Michele
;
Pino, Carmelo
... - p. 1-6 , 2023
Link:
https://doi.org/10.1109/SSI58917.2023.10387766
RT T1 <cTitle>2023 Smart Systems Integration Conference and Exhibition (SSI)</cTitle>: T1 <Title>Deep Learning for Automatic Wafer Monitoring System</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10387766&Exemplar=1&LAN=DE A1 Rundo, Francesco A1 Calabretta, Michele A1 Pino, Carmelo A1 Coffa, Salvatore A1 Messina, Angelo A1 Spampinato, Concetto A1 Battiato, Sebastiano YR 2023 K1 Deep learning K1 Visualization K1 Silicon carbide K1 Pipelines K1 Production K1 System integration K1 Spatiotemporal phenomena K1 EWS K1 CNN K1 Clustering SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/SSI58917.2023.10387766 DO https://doi.org/10.1109/SSI58917.2023.10387766 SF ELIB - SuUB Bremen
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