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1 Ergebnisse
1
The price for integrated bioelectronics: Quantifying the im..:
, In:
2023 IEEE Biomedical Circuits and Systems Conference (BioCAS)
,
Liu, Zhaoyi
;
Lee, Sang Heon
;
Ghadami, Omid
. - p. 1-5 , 2023
Link:
https://doi.org/10.1109/BioCAS58349.2023.10389035
RT T1
2023 IEEE Biomedical Circuits and Systems Conference (BioCAS)
: T1
The price for integrated bioelectronics: Quantifying the impact of e-beam post-processing
UL https://suche.suub.uni-bremen.de/peid=ieee-10389035&Exemplar=1&LAN=DE A1 Liu, Zhaoyi A1 Lee, Sang Heon A1 Ghadami, Omid A1 Hall, Drew A. YR 2023 SN 2766-4465 K1 Degradation K1 Performance evaluation K1 Lithography K1 Metals K1 Impact ionization K1 System-on-chip K1 Biosensors K1 integrated biosensors K1 electron beam lithography K1 CMOS post-processing K1 electron impact ionization SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/BioCAS58349.2023.10389035 DO https://doi.org/10.1109/BioCAS58349.2023.10389035 SF ELIB - SuUB Bremen
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