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Selective Atomic Layer Deposition to Extend Moore's Law and..:

, In: 2023 IEEE 15th International Conference on ASIC (ASICON),
Yan, Jin ; Gu, Eryan ; Cao, Kun.. - p. 1-4 , 2023
Link: https://doi.org/10.1109/ASICON58565.2023.10396279