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1 Ergebnisse
1
Design and Optimization of MEMS Comb Type Capacitive Accele..:
, In:
2023 Seminar on Networks, Circuits and Systems (NCS)
,
Thu, Paing Soe
;
Win Tun, Phyo
;
Kalugin, Victor V.
. - p. 129-133 , 2023
Link:
https://doi.org/10.1109/NCS60404.2023.10397480
RT T1
2023 Seminar on Networks, Circuits and Systems (NCS)
: T1
Design and Optimization of MEMS Comb Type Capacitive Accelerometer
UL https://suche.suub.uni-bremen.de/peid=ieee-10397480&Exemplar=1&LAN=DE A1 Thu, Paing Soe A1 Win Tun, Phyo A1 Kalugin, Victor V. A1 Aung, Ye Ko Ko YR 2023 K1 Accelerometers K1 Micromechanical devices K1 Sensitivity K1 Deformation K1 Resonant frequency K1 Capacitance K1 Finite element analysis K1 comb-drives K1 MEMS K1 capacitance changes K1 sensitive element K1 linear acceleration SP 129 OP 133 LK http://dx.doi.org/https://doi.org/10.1109/NCS60404.2023.10397480 DO https://doi.org/10.1109/NCS60404.2023.10397480 SF ELIB - SuUB Bremen
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